logo Library
My List
My List
Go to my list
  • Log In
    Problems logging in with your UoM account?
    or
    No UoM account? Click here to register a guest account. Have you forgotten your guest credentials?
logo Library
  • Staff
  • Alumni
  • Library
  • LMS
  • Handbook
  • Contact and maps
  • FAQs
  • Communities & Collections
  • Browse Repository
  • Statistics
  • My Lists
search Search
My List
My List
Go to my list
  • Log In
    Problems logging in with your UoM account?
    or
    No UoM account? Click here to register a guest account. Have you forgotten your guest credentials?
  1. Home
  2. Minerva Access
  3. Science
  4. School of Physics
  5. School of Physics - Research Publications
  6. Controlled shallow single-ion implantation in silicon using an active substrate for sub-20-keV ions
 
Library Twitter Library Facebook Library Instagram Library Blogs Library Contacts
The University of Melbourne homepage
  • Current students
  • Staff
  • Alumni
  • Faculty Faculties & graduate schools
  • Location Maps
  • Library Library
  • Campaign Support the campaign
  • Phone Contact us
  • Jobs Jobs

Follow us on:

  • Facebook Facebook
  • Twitter Twitter
  • Linkedin LinkedIn
Phone:
13 MELB (13 6352)
International:
+61 3 9035 5511
ABN:
84 002 705 224
CRICOS Provider Code:
00116K (visa information)
Emergency information | Online terms and privacy | Accessibility | Privacy

Site Map

Study at Melbourne
  • Find a course
  • Admissions, fees & applications
  • International students
  • Virtual campus tour
  • Connect with us
  • Accommodation
About us
  • Strategy and governance
  • Tradition of excellence
  • International connections
  • Campuses and facilities
  • Structure and governance
  • Policy and publications
  • Careers at Melbourne
  • Supplying to the University
Contact & Maps
  • Enquiries
  • Media
  • Find an expert
  • Campus maps
  • Traffic, parking & bicycles
Alumni & friends
  • Benefits & services
  • Give
  • Volunteer
  • 3010: alumni magazine
Research
  • Research institutes
  • Find an expert or supervisor
  • Graduate researchers
  • Pursuit: our research showcase
Engagement
  • Events
  • Sports facilities
  • Shop
Close panel
We acknowledge and pay respect to the Traditional Owners of the lands upon which our campuses are situated.