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Controlled shallow single-ion implantation in silicon using an active substrate for sub-20-keV ions

dc.contributor.authorJamieson, DN
dc.contributor.authorYang, C
dc.contributor.authorHopf, T
dc.contributor.authorHearne, SM
dc.contributor.authorPakes, CI
dc.contributor.authorPrawer, S
dc.contributor.authorMitic, M
dc.contributor.authorGauja, E
dc.contributor.authorAndresen, SE
dc.contributor.authorHudson, FE
dc.contributor.authorDzurak, AS
dc.contributor.authorClark, RG
dc.date.available2014-05-21T19:23:33Z
dc.date.issued2005-05-16
dc.identifierhttp://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000229398000039&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=d4d813f4571fa7d6246bdc0dfeca3a1c
dc.identifierARTN 202101
dc.identifier.citationJamieson, D. N., Yang, C., Hopf, T., Hearne, S. M., Pakes, C. I., Prawer, S., Mitic, M., Gauja, E., Andresen, S. E., Hudson, F. E., Dzurak, A. S. & Clark, R. G. (2005). Controlled shallow single-ion implantation in silicon using an active substrate for sub-20-keV ions. APPLIED PHYSICS LETTERS, 86 (20), https://doi.org/10.1063/1.1925320.
dc.identifier.issn0003-6951
dc.identifier.urihttp://hdl.handle.net/11343/26215
dc.descriptionC1 - Journal Articles Refereed
dc.formatapplication/pdf
dc.languageEnglish
dc.publisherAMER INST PHYSICS
dc.subjectCondensed Matter Physics - Electronic and Magnetic Properties; Superconductivity; Physical Sciences
dc.titleControlled shallow single-ion implantation in silicon using an active substrate for sub-20-keV ions
dc.typeJournal Article
dc.identifier.doi10.1063/1.1925320
melbourne.peerreviewPeer Reviewed
melbourne.affiliationThe University of Melbourne
melbourne.affiliation.departmentPhysics
melbourne.source.titleAPPLIED PHYSICS LETTERS
melbourne.source.volume86
melbourne.source.issue20
melbourne.publicationid38496
melbourne.elementsid269209
melbourne.contributor.authorJamieson, David
melbourne.contributor.authorYANG, CHANGYI
melbourne.contributor.authorHOPF, TOBY FELIX
melbourne.contributor.authorPakes, Christopher
melbourne.contributor.authorPrawer, Steven
melbourne.contributor.authorHEARNE, SEAN
melbourne.internal.ingestnoteAbstract bulk upload (2017-07-20)
dc.identifier.eissn1077-3118
melbourne.accessrightsThis item is currently not available from this repository


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