Development of silicon microelectrodes for cochlear implant technology
AuthorParker, Joanna R.; Harrison, H. Barry; Clark, Graeme M.; Patrick, Jim; Reinhold, Olaf
Source TitleProceedings of 1996 Conference on Optoelectronic and Microelectronic Materials and Devices
University of Melbourne Author/sClark, Graeme
Document TypeConference Paper
CitationsParker, J. R., Harrison, H. B., Clark, G. M., Patrick, J., & Reinhold, O. (1997). Development of silicon microelectrodes for cochlear implant technology. In Proceedings of 1996 Conference on Optoelectronic and Microelectronic Materials and Devices, Canberra.
Access StatusOpen Access
Silicon fabrication technology is being explored as a possible solution to the manufacturing of advanced cochlear implant electrode arrays. Silicon probes have been produced with thickness of 5?m and coated in Parylene� polymer to provide strength. To enable handling they are given a backing of silicone rubber before surgical use. This paper presents some techniques used to produce such silicon microelectrodes.
Keywordsotolaryngology; cochlear implants; silicon fabrication technology
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- Graeme Clark Collection