Development of silicon microelectrodes for cochlear implant technology

    Thumbnail
    Download
    Citations
    Altmetric
    Author
    Parker, Joanna R.; Harrison, H. Barry; Clark, Graeme M.; Patrick, Jim; Reinhold, Olaf
    Date
    1997
    Source Title
    Proceedings of 1996 Conference on Optoelectronic and Microelectronic Materials and Devices
    Publisher
    Piscataway
    University of Melbourne Author/s
    Clark, Graeme
    Metadata
    Show full item record
    Document Type
    Conference Paper
    Citations
    Parker, J. R., Harrison, H. B., Clark, G. M., Patrick, J., & Reinhold, O. (1997). Development of silicon microelectrodes for cochlear implant technology. In Proceedings of 1996 Conference on Optoelectronic and Microelectronic Materials and Devices, Canberra.
    Access Status
    Open Access
    URI
    http://hdl.handle.net/11343/27005
    Abstract
    Silicon fabrication technology is being explored as a possible solution to the manufacturing of advanced cochlear implant electrode arrays. Silicon probes have been produced with thickness of 5?m and coated in Parylene� polymer to provide strength. To enable handling they are given a backing of silicone rubber before surgical use. This paper presents some techniques used to produce such silicon microelectrodes.
    Keywords
    otolaryngology; cochlear implants; silicon fabrication technology

    Export Reference in RIS Format     

    Collections