Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond
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2005-10-17
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Advanced Materials
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WILEY-V C H VERLAG GMBH
Melbourne Authors
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Physics
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Journal Article
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Olivero, P., Rubanov, S., Reichart, P., Gibson, B. C., Huntington, S. T., Rabeau, J., Greentree, A. D., Salzman, J., Moore, D., Jamieson, D. N. & Prawer, S. (2005). Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond. Advanced Materials, 17 (20), pp.2427-2430. https://doi.org/10.1002/adma.200500752.
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C1 - Journal Articles Refereed
Abstract
The machining of 3D microstructures in single‐crystal artificial diamond is demonstrated with a focused ion beam (FIB)‐assisted lift‐off technique. A sacrificial buried layer is created with MeV ion implantation, followed by patterning of selected regions with the FIB technique; the sacrificial layer is then selectively etched, leaving 3D free‐standing microstructures in the bulk (see Figure). Using this fabrication technique, light waveguiding through a microstructure in single‐crystal diamond is demonstrated for the first time.
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Condensed Matter Physics - Structural Properties ; Physical Sciences