TY  - JOUR
AU  - Johnson, BC
AU  - McCallum, JC
Y2  - 2014/05/21
Y1  - 2004/04/15
SN  - 0021-8979
UR  - http://hdl.handle.net/11343/26276
N1  - application/pdf
LA  - English
PB  - AMER INST PHYSICS
KW  - Condensed Matter Physics - Structural Properties ; Physical Sciences
T1  - Kinetics of arsenic-enhanced solid phase epitaxy in silicon
DO  - 10.1063/1.1682672
IS  - JOURNAL OF APPLIED PHYSICS
VL  - 95
IS  - 8
SP  - 4427-4431
L1  - /bitstream/handle/11343/26276/116048_5105.pdf?sequence=1&isAllowed=n
ER  -